MICROGAN Industry is a very compact (11 kg) ECR ion source with magnetic field provided by permanent magnets. MICROGAN Industry offers intense beams of low and medium charged ions. It operates at a frequency of 10GHz, with maximum RF power of 200W (water cooling of the plasma chamber is needed when working at maximum RF power). MICROGAN Industry is a powerful tool for industrial applications, such as ion implantation. Due to its very low power consumption, this ECRIS can be used in almost all possible configurations including high voltage platforms and high voltage terminals.

Microgan full permanent magnet ECR ion source